CVD和ALD前驱体
选项
-
-
-
-
-
-
-
-
顺二氯二羰基铂(II)CAS号 : 25478-60-8 Compound CID : 73759933分子式: C2Cl2O2Pt 分子量: 322IUPAC Name: carbon monoxide;dichloroplatinumSMILES: [C-]#[O+].[C-]#[O+].Cl[Pt]ClInChIKey: LDKSTCHEYCNPDS-UHFFFAOYSA-LInChI: InChI=1S/2CO.2ClH.Pt/c2*1-2;;;/h;;2*1H;/q;;;;+2/p-2
-
-
-
六氟乙酰丙酮锡(II)CAS号 : 112131-28-9 Compound CID : 133109276分子式: C10H2F12O4Sn 分子量: 532.81IUPAC Name: (Z)-1,1,1,5,5,5-hexafluoro-4-oxopent-2-en-2-olate;tin(2+)SMILES: C(=C(C(F)(F)F)[O-])C(=O)C(F)(F)F.C(=C(C(F)(F)F)[O-])C(=O)C(F)(F)F.[Sn+2]InChIKey: BCJZLQBNRGOBSY-PAMPIZDHSA-LInChI: InChI=1S/2C5H2F6O2.Sn/c2*6-4(7,8)2(12)1-3(13)5(9,10)11;/h2*1,12H;/q;;+2/p-2/b2*2-1-;