CVD和ALD前驱体
选项
-
-
-
-
-
-
-
-
顺二氯二羰基铂(II)CAS号 : 25478-60-8 Compound CID : 73759933分子式: C2Cl2O2Pt 分子量: 322IUPAC Name: carbon monoxide;dichloroplatinumSMILES: [C-]#[O+].[C-]#[O+].Cl[Pt]ClInChIKey: LDKSTCHEYCNPDS-UHFFFAOYSA-LInChI: InChI=1S/2CO.2ClH.Pt/c2*1-2;;;/h;;2*1H;/q;;;;+2/p-2
-
己基(二甲氨基)二铝CAS号 : 32093-39-3 Compound CID : 16688802分子式: C12H36Al2N6 分子量: 318.42IUPAC Name: N-[bis(dimethylamino)alumanyl]-N-methylmethanamineSMILES: CN(C)[Al](N(C)C)N(C)C.CN(C)[Al](N(C)C)N(C)CInChIKey: JGZUJELGSMSOID-UHFFFAOYSA-NInChI: InChI=1S/6C2H6N.2Al/c6*1-3-2;;/h6*1-2H3;;/q6*-1;2*+3
-
-